Concepedia

Masaru Moriwaki

MM

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Publications

2

Citations

45

H-Index

2

Active since

2000

Affiliations

Panasonic (Japan)(Current)

Masaru Moriwaki is an author at Panasonic (Japan) specializing in semiconductor device materials, semiconductor reliability, and materials science.

Publications per year

2000–2001

2

Publications

2

Influences of Residual Chlorine in CVD-TiN Gate Electrode on the Gate Oxide Reliability in Multiple-Thickness Oxide Technology

Masaru Moriwaki, Takayuki Yamada · Japanese Journal of Applied Physics · 2001 · 26 citations

Engineering, Electrical Engineering, Materials Science +17

Improved Metal Gate Process by Simultaneous Gate-Oxide Nitridation during W/WN<sub>x</sub> Gate Formation

Masaru Moriwaki, Takayuki Yamada, Yoshinao Harada et al. · Japanese Journal of Applied Physics · 2000 · 19 citations

Engineering, Electrical Engineering, Materials Science +17

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