Concepedia

Hwi-Won Cho

HC

Statistics

Publications

3

Citations

51

H-Index

3

Active since

2020

Affiliations

Hanyang University(Current)

Ebara (Japan)

Hwi-Won Cho is an author at Hanyang University specializing in surface science, surface spectroscopy, and surface reactions.

Publications per year

2020–2022

3

Publications

3

Characterization of Different Cobalt Surfaces and Interactions with Benzotriazole for CMP Application

Heon-Yul Ryu, Chanhee Lee, Jun-Kil Hwang et al. · ECS Journal of Solid State Science and Technology · 2020 · 21 citations

, , +17

Effect of slurry particles on PVA brush contamination during post-CMP cleaning

Samrina Sahir, Hwi-Won Cho, Palwasha Jalalzai et al. · Materials Science in Semiconductor Processing · 2022 · 17 citations

, , +10

Study on PVA Brush Loading and Conditioning during Shallow Trench Isolation Post-CMP Cleaning Process

Samrina Sahir, Hwi-Won Cho, Tae‐Gon Kim et al. · ECS Journal of Solid State Science and Technology · 2022 · 13 citations

, , +16

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