Concepedia

P. Faurie

PF

2

Publications

29

Citations

2

H-Index

2007

Active since

Affiliations

Commissariat à l'Énergie Atomique et aux Énergies Alternatives(Current)

Laboratoire d'Électronique des Technologies de l'Information

P. Faurie is an author at Commissariat à l'Énergie Atomique et aux Énergies Alternatives specializing in microelectronics, measurement, and calibration.

Top concepts

Publications per year

2007–2009

2

Publications

2

Advances in CD-AFM scan algorithm technology enable improved CD metrology

Lars Mininni, J. Foucher, P. Faurie · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 17 citations

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The measurement uncertainty challenge for the future technological nodes production and development

J. Foucher, P. Faurie, A.-L. Foucher et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 12 citations

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