Sz. Kátai

High-Resolution Thermal Processing of Semiconductors Using Pulsed-Laser Interference Patterning

M. K. Kelly, Joseph Rogg, Christoph E. Nebel et al. · physica status solidi (a) · 1998 · 55 citations

Wide-bandgap Semiconductor, Optical Materials, Engineering +17

Measurement of ion energy distributions in the bias enhanced nucleation of chemical vapor deposited diamond

Sz. Kátai, Z. Tass, Gy. Hárs et al. · Journal of Applied Physics · 1999 · 36 citations

Engineering, Chemistry, Ion Process +18

Ion energy distributions and their evolution during bias-enhanced nucleation of chemical vapor deposition of diamond

Sz. Kátai, Antal Kováts, I. Maros et al. · Diamond and Related Materials · 2000 · 21 citations

Diamond-like Carbon, Ion Implantation, Ion Energy Distributions +9

Characterization of nucleation and growth of MW-CVD diamond films by spectroscopic ellipsometry and ion beam analysis methods

István Pintér, P. Petrík, E. Szilágyi et al. · Diamond and Related Materials · 1997 · 10 citations

Materials Science, Diamond-like Carbon, Engineering +6

Ion beam mass spectrometer for compositional analysis of plasma assisted surface processes in the pressure range of 1–50 mbar

Sz. Kátai, Z. Tass, L. Bori et al. · Review of Scientific Instruments · 1999 · 10 citations

Compositional Analysis, Real-time Monitoring, Engineering +19