Concepedia

Thor Eusner

TE

5

Publications

138

Citations

5

H-Index

2008

Active since

Affiliations

Massachusetts Institute of Technology(Current)

Thor Eusner is an author at Massachusetts Institute of Technology specializing in engineering, mechanical engineering, and surface polishing.

Top concepts

EngineeringMechanical EngineeringMaterial ScienceSurface PolishingSurface ScienceMicrostructureMicrofabricationSurface IntegrityMaterials EngineeringCorrosion

Publications per year

2008–2011

5

Publications

5

Nano-scale scratching in chemical–mechanical polishing

Nannaji Saka, Thor Eusner, Jung‐Hoon Chun · CIRP Annals · 2008 · 71 citations

Materials Science, Engineering, Mechanical Engineering +4

Scratching by pad asperities in chemical–mechanical polishing

Nannaji Saka, Thor Eusner, Jung‐Hoon Chun · CIRP Annals · 2010 · 30 citations

Materials Science, Engineering, Surface Science +6

Process Robustness of Hot Embossing Microfluidic Devices

Thor Eusner, Melinda Hale, David E. Hardt · Journal of Manufacturing Science and Engineering · 2010 · 16 citations

Engineering, Microfabrication, Mechanical Engineering +13

Breaking-In a Pad for Scratch-Free, Cu Chemical-Mechanical Polishing

Thor Eusner, Nannaji Saka, Jung‐Hoon Chun · Journal of The Electrochemical Society · 2011 · 11 citations

Engineering, Mechanical Engineering, Surface Integrity +18

Controlling Scratching in Cu Chemical Mechanical Planarization

Thor Eusner, Nannaji Saka, Jung‐Hoon Chun et al. · Journal of The Electrochemical Society · 2009 · 10 citations

Materials Science, Materials Engineering, Homogeneous Coatings +12

Rows per page

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