L. Niles

Micromachined high frequency ferroelectric sonar transducers

Jonathan Bernstein, S. Finberg, K. Houston et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 1997 · 266 citations

Materials Science, Sol-gel Pzt, Engineering +14

Silicon monolithic micromechanical gyroscope

Paul Greiff, Burton Boxenhorn, Tsu‐Jae King et al. · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 2002 · 142 citations

Engineering, Monolithic Silicon Gyroscope, Mechanical Engineering +18

Dielectric, ferroelectric, and piezoelectric properties of lead zirconate titanate thick films on silicon substrates

H. D. Chen, Krishna Udayakumar, L. E. Cross et al. · Journal of Applied Physics · 1995 · 128 citations

Materials Science, Screen Printing, Engineering +13

Photoassisted electrochemical micromachining of silicon in HF electrolytes

Richard Mlcak, Harry L. Tuller, Paul Greiff et al. · Sensors and Actuators A Physical · 1994 · 25 citations

Chemical Engineering, Engineering, Microfabrication +4

<title>Micromachining inertial instruments</title>

Marc S. Weinberg, Jonathan Bernstein, Jeffrey T. Borenstein et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 22 citations

Engineering, Measurement, Mechanical Engineering +20