Concepedia

L. Zhang

LZ

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Publications

1

Citations

27

H-Index

1

Active since

2015

Affiliations

Tokyo Electron (Japan)(Current)

L. Zhang is an author at Tokyo Electron (Japan) specializing in surface science, materials science, and low-temperature materials.

Publications per year

2015–2015

1

Publications

1

Cryogenic etching processes applied to porous low-<i>k</i>materials using SF<sub>6</sub>/C<sub>4</sub>F<sub>8</sub>plasmas

Frédéric Leroy, L. Zhang, Thomas Tillocher et al. · Journal of Physics D Applied Physics · 2015 · 27 citations

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