Concepedia

Ph. Flueckiger

PF

Statistics

Publications

2

Citations

285

H-Index

2

Active since

1995

Affiliations

Stanford University(Current)

Ph. Flueckiger is an author at Stanford University specializing in microfabrication, applied physics, and microelectronics.

Top concepts

Publications per year

1995–1995

2

Publications

2

Fabrication of 0.1 μm metal oxide semiconductor field-effect transistors with the atomic force microscope

S. C. Minne, H. Tom Soh, Ph. Flueckiger et al. · Applied Physics Letters · 1995 · 181 citations · Full text

, , +17

Atomic force microscope lithography using amorphous silicon as a resist and advances in parallel operation

S. C. Minne, Ph. Flueckiger, H. Tom Soh et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 104 citations · Full text

, , +19

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