H. A. C. Tilmans

LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design*

H. A. C. Tilmans, C.C.G. Visser · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 165 citations · Full text

Thin Film Physics, Optical Materials, Engineering +23

Creep as a reliability problem in MEMS

Robert Modliński, Ann Witvrouw, Petar Ratchev et al. · Microelectronics Reliability · 2004 · 47 citations

Reliability Engineering, Engineering, Hardware Reliability +7

RF MEMS for ubiquitous wireless connectivity. Part II. Application

Héctor J. De Los Santos, Georg Fischer, H. A. C. Tilmans et al. · IEEE Microwave Magazine · 2004 · 42 citations

Electrical Engineering, Engineering, Radio Frequency +13

High-Q torsional mode Si triangular beam resonators encapsulated using SiGe thin film

Y. Naito, Philippe Hélin, Kazuo Nakamura et al. · 2010 · 22 citations

Electrical Engineering, Engineering, Oscillators +12

Above-IC generic poly-SiGe thin film wafer level packaging and MEM device technology: Application to accelerometers

Baicang Guo, Lianggong Wen, Philippe Hélin et al. · 2011 · 19 citations

Engineering, Device Integration, Mem Device Technology +22