W. Shindo

Ion energy, ion flux, and ion mass effects on low-temperature silicon epitaxy using low-energy ion bombardment process

W. Shindo, Tadahiro Ohmi · Journal of Applied Physics · 1996 · 62 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +15

In-line yield prediction methodologies using patterned wafer inspection information

R.K. Nurani, Andrzej J. Strojwas, W. Maly et al. · IEEE Transactions on Semiconductor Manufacturing · 1998 · 52 citations

Engineering, Electrical Engineering, Microelectronics +14

Effective excursion detection by defect type grouping in in-line inspection and classification

W. Shindo, Eryi Wang, Ram Akella et al. · IEEE Transactions on Semiconductor Manufacturing · 1999 · 25 citations

Management, Industrial Engineering, Manufacturing Engineering +17

Low-temperature large-grain poly-Si direct deposition by microwave plasma enhanced chemical vapor deposition using SiH4/Xe

W. Shindo, Shigefumi Sakai, Hiroaki Tanaka et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 12 citations

Engineering, Materials Engineering, Materials Science +17