Concepedia

J. C. Chen

JC

1

Publications

18

Citations

1

H-Index

2011

Active since

Affiliations

ITRI International(Current)

J. C. Chen is an author at ITRI International specializing in surface science, materials science, and microelectronics.

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Publications per year

2011–2011

1

Publications

1

Impact of slurry in Cu CMP (chemical mechanical polishing) on Cu topography of Through Silicon Vias (TSVs), re-distribution layers, and Cu exposure

J. C. Chen, P. J. Tzeng, Sheng‐Chih Chen et al. · 2011 · 18 citations

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