Concepedia

Seiji Shinagawa

SS

3

Publications

46

Citations

3

H-Index

2005

Active since

Affiliations

Musashi University(Current)

Fujitsu (Japan)

Seiji Shinagawa is an author at Musashi University specializing in engineering, applied physics, and thin films.

Top concepts

Publications per year

2005–2006

3

Publications

3

Angle-resolved XPS study on chemical bonds in ultrathin silicon oxynitride films

Seiji Shinagawa, Hiroshi Nohira, Tetsuya Ikuta et al. · Microelectronic Engineering · 2005 · 24 citations

, , +10

Angle-resolved photoelectron spectroscopy on gate insulators

Takanori Hattori, Hiroshi Nohira, Seiji Shinagawa et al. · Microelectronics Reliability · 2006 · 12 citations

, , +2

X-ray photoelectron spectroscopy study of dielectric constant for Si compounds

Kazuyuki Hirose, Michio Kihara, Daisuke Kobayashi et al. · Applied Physics Letters · 2006 · 10 citations

Rows per page

1–3 of 3