Concepedia

Jerzy Rużyłło

JR

5

Publications

90

Citations

5

H-Index

1976

Active since

Affiliations

Institute of Electron Technology(Current)

University of Warsaw

Jerzy Rużyłło is an author at Institute of Electron Technology specializing in engineering, applied physics, and technology.

Top concepts

EngineeringApplied PhysicsTechnologyMicroelectronicsChemistryTunnelingPhotochemistryThermodynamicsSurface ScienceWater Treatment

Publications per year

1976–1999

5

Publications

5

Advanced wet and dry cleaning coming together for next generation

Marc Heyns, Paul Mertens, Jerzy Rużyłło et al. · Solid State Technology · 1999 · 27 citations

Sanitation, Engineering, Desiccation +6

Low Temperature Oxidation of Silicon Studied by Photosensitive ESR and Auger Electron Spectroscopy

Jerzy Rużyłło, Ikuo Shiota, Nobuo Miyamoto et al. · Journal of The Electrochemical Society · 1976 · 24 citations

Engineering, Oxidation Resistance, Thermal Oxidation +17

Oxygen pressure as a parameter in the D.C. plasma anodization of silicon

Romuald B. Beck, M.J. Patyra, Jerzy Rużyłło et al. · Thin Solid Films · 1980 · 17 citations

Engineering, Nonthermal Plasma, Applied Physics +5

EVALUATING THE FEASIBILITY OF DRY CLEANING OF SILICON WAFERS.

Jerzy Rużyłło · 1988 · 12 citations

Wafer Scale Processing, Engineering, Microfabrication +2

Effect of minority carrier injection on lateral current in MIS tunnel structures

Jerzy Rużyłło, K. Kucharski, A. Jakubowski · Solid-State Electronics · 1980 · 10 citations

Electrical Engineering, Minority Carrier Injection, Engineering +7

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