Katja Rügner

The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure

Rüdiger Reuter, Katja Rügner, Dirk Ellerweg et al. · Plasma Processes and Polymers · 2012 · 49 citations

Natural Sciences, Materials Engineering, Materials Science +13

Insight into the Reaction Scheme of Si<scp>O</scp>₂ Film Deposition at Atmospheric Pressure

Katja Rügner, Rüdiger Reuter, Dirk Ellerweg et al. · Plasma Processes and Polymers · 2013 · 40 citations

Natural Sciences, Chemistry, Materials Science +15

Mass spectrometry of positive ions and neutral species in the effluent of an atmospheric pressure plasma with hexamethyldisiloxane and oxygen

Jan Benedikt, Dirk Ellerweg, Sebastian Schneider et al. · Journal of Physics D Applied Physics · 2013 · 24 citations

Natural Sciences, Chemistry, Materials Science +14

Mapping of properties of thin plasma jet films using imaging spectroscopic reflectometry

David Nečas, Vladimír Čudek, Jiří Vodák et al. · Measurement Science and Technology · 2014 · 18 citations

Natural Sciences, Materials Science, Physics +17