Statistics
Publications
20
Citations
967
H-Index
16
Active since
2002
S. Jakschik is an author at Infineon Technologies (Germany) specializing in materials science, engineering, and materials engineering.
Publications per year
2002–2012
20
20
Crystallization behavior of thin ALD-Al2O3 films
S. Jakschik, Uwe Schroeder, T. Hecht et al. · Thin Solid Films · 2003 · 272 citations
Natural Sciences, Materials Engineering, Materials Science +14
Transport mechanisms in atomic-layer-deposited Al2O3 dielectrics
Michael Specht, M. Städele, S. Jakschik et al. · Applied Physics Letters · 2004 · 116 citations
Physical characterization of thin ALD–Al2O3 films
S. Jakschik, Uwe Schroeder, T. Hecht et al. · Applied Surface Science · 2003 · 79 citations
Natural Sciences, Materials Engineering, Materials Science +14
Mechanical stress in ALD-Al2O3 films
G. Krautheim, T. Hecht, S. Jakschik et al. · Applied Surface Science · 2005 · 73 citations
Natural Sciences, Materials Engineering, Materials Science +14
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