Concepedia

Zi-Guo Dai

ZD

3

Publications

104

Citations

3

H-Index

1993

Active since

Affiliations

Columbia University(Current)

Zi-Guo Dai is an author at Columbia University specializing in microelectronics, surface science, and applied physics.

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Publications per year

1993–1994

3

Publications

3

Dry etching of GaAs with Cl2: correlation between the surface Cl coverage and the etching rate at steady state

Su Chaochin, Ming Xi, Zi-Guo Dai et al. · Surface Science · 1993 · 46 citations · Full text

, , +23

Identification of the volatile reaction products of the Cl2+GaAs etching reaction

Chaochin Su, Hui-qui Hou, Gang Ho Lee et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 37 citations

, , +17

Chemical dry etching of GaAs(100) by HC1: products, rate, and a kinetic model

Chaochin Su, Zi-Guo Dai, Weiang Luo et al. · Surface Science · 1994 · 21 citations

, , +11

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