Concepedia

M. Gebhard

MG

16

Publications

346

Citations

12

H-Index

1989

Active since

Affiliations

Ruhr University Bochum(Current)

Paderborn University

Friedrich-Alexander-Universität Erlangen-Nürnberg

Institute of Inorganic Chemistry of the Slovak Academy of Sciences

RWTH Aachen University

M. Gebhard is an author at Ruhr University Bochum specializing in applied physics, engineering, and thin films.

ORCID

Top concepts

Publications per year

1989–2023

16

Publications

16

PEALD of SiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads

M. Gebhard, Lukas Mai, Lars Banko et al. · ACS Applied Materials & Interfaces · 2018 · 50 citations

Indium-tris-guanidinates: a promising class of precursors for water assisted atomic layer deposition of In<sub>2</sub>O<sub>3</sub>thin films

M. Gebhard, M. Hellwig, Harish Parala et al. · Dalton Transactions · 2013 · 35 citations

, , +15

Nanostructured Fe<sub>2</sub>O<sub>3</sub> Processing via Water‐Assisted ALD and Low‐Temperature CVD from a Versatile Iron Ketoiminate Precursor

Daniel Peeters, Alexander Sadlo, Katarina Lowjaga et al. · Advanced Materials Interfaces · 2017 · 35 citations · Full text

, , +19

An efficient PE-ALD process for TiO<sub>2</sub> thin films employing a new Ti-precursor

M. Gebhard, Felix Mitschker, Martin Wiesing et al. · Journal of Materials Chemistry C · 2016 · 29 citations · Full text

, , +14

New amidinate complexes of indium(<scp>iii</scp>): promising CVD precursors for transparent and conductive In<sub>2</sub>O<sub>3</sub>thin films

M. Gebhard, M. Hellwig, A. Kroll et al. · Dalton Transactions · 2017 · 28 citations

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