Concepedia

Lucia Feng

LF

Statistics

Publications

3

Citations

41

H-Index

3

Active since

2001

Affiliations

University of California, Berkeley(Current)

Lucia Feng is an author at University of California, Berkeley specializing in engineering, materials science, and thermal annealing.

Publications per year

2001–2006

3

Publications

3

Minimizing Pattern Dependency in Millisecond Annealing

Lucia Feng, Yun Wang, David A. Markle · 2006 · 17 citations

, , +17

Dopant profile engineering of CMOS devices formed by non-melt laser spike annealing

Akio Shima, Y. Wang, D. Upadhyaya et al. · 2005 · 13 citations

, , +17

A plasma immersion implantation system for materials modification

Michael Current, Wei Liu, I. Roth et al. · Surface and Coatings Technology · 2001 · 11 citations

, , +12

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