Statistics
Publications
2
Citations
72
H-Index
2
Active since
1985
Affiliations
University of Florida(Current)
R. L. Kauffman is an author at University of Florida specializing in applied physics, instrumentation, and engineering.
Publications per year
1985–1993
2
2
Soft x-ray production from laser produced plasmas for lithography applications
R. Spitzer, R. L. Kauffman, T. J. Orzechowski et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 46 citations
Engineering, Conversion Efficiency, Laser-plasma Interaction +17
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