Concepedia

E Deckardt

ED

3

Publications

181

Citations

3

H-Index

2001

Active since

Affiliations

Institute of Semiconductor Physics(Current)

Paul Scherrer Institute

E Deckardt is an author at Institute of Semiconductor Physics specializing in microfabrication, applied physics, and microelectronics.

Top concepts

Publications per year

2001–2004

3

Publications

3

A new technique for fabricating three-dimensional micro- and nanostructures of various shapes

V. Ya. Prinz, Detlev Grützmacher, André Beyer et al. · Nanotechnology · 2001 · 127 citations

, , +22

Free-standing Si/SiGe micro- and nano-objects

Li Zhang, S. V. Golod, E Deckardt et al. · Physica E Low-dimensional Systems and Nanostructures · 2004 · 42 citations

, , +6

Fabrication of SiGe/Si/Cr bent cantilevers based on self-rolling of epitaxial films

S. V. Golod, Detlev Grützmacher, Christian Dávid et al. · Microelectronic Engineering · 2003 · 12 citations

, , +11

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