Akinori Furuya

Target magnetic-field effects on deposition rate in rf magnetron sputtering

Akinori Furuya, Shigeru Hirono · Journal of Applied Physics · 1990 · 22 citations

Natural Sciences, Electrical Engineering, Physics +17

Fabrication of fluorinated polyimide microgrids using magnetically controlled reactive ion etching (MC-RIE) and their applications to an ion drag integrated micropump

Akinori Furuya, Fusao Shimokawa, Tohru Matsuura et al. · Journal of Micromechanics and Microengineering · 1996 · 22 citations

Engineering, Materials Engineering, Materials Science +12

Compact Electro-Optic Sensor Module for Intra-Body Communication Using Optical Pickup Technology

Mitsuru Shinagawa, Ai-ichiro Sasaki, Akinori Furuya et al. · Japanese Journal of Applied Physics · 2013 · 19 citations

Engineering, Communication, Electrical Engineering +16

Magneto-optical properties of a sputtered Bi-substituted Dy–Fe garnet-ferrite/hematite bilayer

Akinori Furuya, H. Yoshikawa, Takehiko Tanabe et al. · Journal of Applied Physics · 1999 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +17

Micro-grid fabrication of fluorinated polyimide by using magnetically controlled reactive ion etching (MC-RIE)

Akinori Furuya, Fusao Shimokawa, Takeshi Matsuura et al. · 2002 · 13 citations

Engineering, Materials Engineering, Materials Science +17