Concepedia

Hen-Lin Chen

HC

Statistics

Publications

1

Citations

12

H-Index

1

Active since

2021

Affiliations

LI-COR Biosciences (United States)(Current)

Hen-Lin Chen is an author at LI-COR Biosciences (United States) specializing in airflow simulation, semiconductor devices, and relative humidity measurement.

Publications per year

2021–2021

1

Publications

1

Flow Analysis and Relative Humidity (RH) Measurement in the Horizontal Plane of a Front Opening Unified Pod (FOUP)

Tee Lin, Omid Ali Zargar, Hen-Lin Chen et al. · IEEE Transactions on Semiconductor Manufacturing · 2021 · 12 citations

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