Concepedia

Mitsuru Sekiguchi

MS

1

Publications

19

Citations

1

H-Index

1994

Active since

Affiliations

Panasonic (Japan)(Current)

Mitsuru Sekiguchi is an author at Panasonic (Japan) specializing in electrical engineering, thin films, and materials engineering.

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Publications per year

1994–1994

1

Publications

1

Electromigration in AlSiCu/TiN/Ti interconnects with Ti and TiN additional layers

Mitsuru Sekiguchi, Kazuyuki Sawada, Masanori Fukumoto et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 19 citations

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