Shigeru Futami

Nanometer positioning and its micro-dynamics

Shigeru Futami, Akihiro Furutani, Sanichiro Yoshida · Nanotechnology · 1990 · 187 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17

Nanometer Positioning Using AC Linear Motor and Rolling Guide. (2nd Report). Tribology of the Rolling Guide.

Shigeru Futami, Akihiro Furutani · Journal of the Japan Society for Precision Engineering · 1991 · 22 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +15

Nonlinear Friction Behavior of Discontinuity at Stroke End in a Ball Guide Way

Kazuhiro Tsuruta, Teruo MURAKAMI, Shigeru Futami · Journal of the Japan Society for Precision Engineering · 2003 · 21 citations · Full text

Engineering, Mechanical Engineering, Robot Dynamics +13

Nanometer positioning using AC linear motor and rolling guide. (1st report). System set-up and coarse/fine positioning.

Shigeru Futami, Akihiro Furutani · Journal of the Japan Society for Precision Engineering · 1991 · 18 citations · Full text

Engineering, Mechanical Engineering, Mechatronics Engineering +15

Quadrant glitch compensation by a modified disturbance observer for linear motor stages

Tomofumi OHASHI, Hitoshi Shibata, Shigeru Futami et al. · Precision Engineering · 2019 · 14 citations

Engineering, Mechatronics Engineering, Motor Control +8