Nanometer positioning using AC linear motor and rolling guide. (1st report). System set-up and coarse/fine positioning. - Concepedia

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Nanometer positioning using AC linear motor and rolling guide. (1st report). System set-up and coarse/fine positioning.

DOI Full Paper Access

18

Citations

0

References

1991

Year

Shigeru Futami, Akihiro Furutani

Journal of the Japan Society for Precision Engineering

Abstract

A one-axis stage mechanism, driven by an AC linear motor and guided by a rolling ball guide, has been constructed.