Statistics
Publications
1
Citations
13
H-Index
1
Active since
2008
Affiliations
Nanya Technology (Taiwan)(Current)
Hong Wen Lee is an author at Nanya Technology (Taiwan) specializing in electron beam lithography, engineering, and spacer design.
Publications per year
2008–2008
1
1
Spacer double patterning technique for sub-40nm DRAM manufacturing process development
Weicheng Shiu, William Ma, Hong Wen Lee et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 13 citations
Engineering, Electrical Engineering, Manufacturing Engineering +14
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