O B Khristoforov

EUV sources using Xe and Sn discharge plasmas

Vladimir M. Borisov, Aleksander V Eltsov, Aleksander S Ivanov et al. · Journal of Physics D Applied Physics · 2004 · 47 citations

Natural Sciences, Manufacturing Engineering, Physics +15

Use of a discharge over a dielectric surface for preionization in excimer lasers

V Yu Baranov, A M Davidovskiĭ, O B Khristoforov · Soviet Journal of Quantum Electronics · 1981 · 21 citations

Engineering, Electrical Engineering, Physics +14

Excimer electric-discharge laser with plasma electrodes

V Yu Baranov, O B Khristoforov · Soviet Journal of Quantum Electronics · 1981 · 20 citations

Natural Sciences, Electrical Engineering, Physics +13

High-power EUV sources for lithography: a comparison of laser-produced plasma and gas-discharge-produced plasma

Uwe Stamm, Imtiaz Ahmad, Vladimir M. Borisov et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 18 citations

Natural Sciences, Manufacturing Engineering, Physics +16

Wide-aperture electric-discharge XeCl laser with ultraviolet preionization and 20-J output energy

V Yu Baranov, D. N. Molchanov, V. P. Novikov et al. · Soviet Journal of Quantum Electronics · 1987 · 15 citations

Natural Sciences, Physics, Plasma Physics +15