Concepedia

Aleksander S Ivanov

AS

1

Publications

46

Citations

1

H-Index

2004

Active since

Affiliations

State Research Center of the Russian Federation(Current)

Aleksander S Ivanov is an author at State Research Center of the Russian Federation specializing in engineering, instrumentation, and plasma physics.

Top concepts

EngineeringPlasma PhysicsApplied PhysicsInstrumentationMicroelectronicsElectrical Engineering

Publications per year

2004–2004

1

Publications

1

EUV sources using Xe and Sn discharge plasmas

Vladimir M. Borisov, Aleksander V Eltsov, Aleksander S Ivanov et al. · Journal of Physics D Applied Physics · 2004 · 46 citations

Euv Sources, Electrical Engineering, Electrode Surfaces +9

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