Tugumichi Shibata is an author at Tohoku University specializing in microelectronics, materials science, and thin films.
Top concepts
Thin FilmsEngineeringMicrostructureApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationIntegrated CircuitsElectronic Packaging
Publications per year
1988–1988
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