C. Lu

Improved method of nonintrusive deposition rate monitoring by atomic absorption spectroscopy for physical vapor deposition processes

C. Lu, Yingxin Guan · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 46 citations

Optical Materials, Engineering, Atomic Emission Spectroscopy +21

Future trends for large-area pulsed laser deposition

James A. Greer, M. D. Tabat, C. Lu · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1997 · 33 citations

Advanced Laser Processing, Engineering, Applied Physics +3

Rate controlling and composition analysis of alloy deposition processes by electron impact emission spectroscopy (EIES)

C. Lu, M. J. Lightner, C. A. Gogol · Journal of Vacuum Science and Technology · 1977 · 31 citations

Engineering, Atomic Emission Spectroscopy, Alloy Deposition Processes +23

An electron impact emission spectroscopy flux sensor for monitoring deposition rate at high background gas pressure with improved accuracy

C. Lu, C. D. Blissett, Georg Diehl · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2008 · 14 citations

Optical Materials, Engineering, Gas Sensor +21