Concepedia

J. H. Beberman

JH

Statistics

Publications

4

Citations

178

H-Index

4

Active since

1985

Affiliations

University of Illinois Urbana-Champaign(Current)

J. H. Beberman is an author at University of Illinois Urbana-Champaign specializing in electrical engineering, applied physics, and engineering.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringPhysicsHydrogenCosmic RayPulse PowerPlasma TheoryAtomic PhysicsPlasma Physics

Publications per year

1985–1990

4

Publications

4

Modulated discharges: Effect on plasma parameters and deposition

J. T. Verdeyen, J. H. Beberman, Lawrence Overzet · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 76 citations

Continuous Wave, Electrical Engineering, Electronic Devices +14

Enhancement of the negative ion flux to surfaces from radio-frequency processing discharges

Lawrence Overzet, J. H. Beberman, J. T. Verdeyen · Journal of Applied Physics · 1989 · 61 citations

Electrical Engineering, Engineering, Physics +14

Measurement of the electron density and the attachment rate coefficient in silane/helium discharges

C. B. Fleddermann, J. H. Beberman, J. T. Verdeyen · Journal of Applied Physics · 1985 · 31 citations

Engineering, Glow Discharge, Plasma Science +16

Damaged and damage-free hydrogenation of GaAs: The effect of reactor geometry

Gordon Jackson, J. H. Beberman, M. S. Feng et al. · Journal of Applied Physics · 1988 · 10 citations

Electrical Engineering, Coupled System, Engineering +10

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