Concepedia

Paul F. Luehrmann

PF

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Publications

1

Citations

12

H-Index

1

Active since

1993

Affiliations

Mapper Lithography (Netherlands)(Current)

Paul F. Luehrmann is an author at Mapper Lithography (Netherlands) specializing in ophthalmology, engineering, and applied physics.

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Publications per year

1993–1993

1

Publications

1

0.35-μm lithography using off-axis illumination

Paul F. Luehrmann, Peter van Oorschot, Hans Jasper et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 12 citations

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