Concepedia

Michael M. Har-zvi

MM

Statistics

Publications

2

Citations

29

H-Index

2

Active since

2013

Affiliations

KLA (Israel)(Current)

Michael M. Har-zvi is an author at KLA (Israel) specializing in quality engineering, overlay metrology, and metrology.

Publications per year

2013–2013

2

Publications

2

Quality metric for accurate overlay control in <20nm nodes

Dana Klein, Eran Amit, G. M. Cohen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 15 citations

, , +9

Overlay accuracy calibration

Eran Amit, Dana Klein, G. M. Cohen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 14 citations

, , +15

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