Ming-Ku Chen - Concepedia

Author

Ming-Ku Chen

Also Known As

Ming-Ku Chen

Publications

142

Citations

H-Index

Concepts

All Affiliations

Ming-Ku Chen is an author at National Chung Hsing University specializing in applied physics, engineering, and materials science.

#	Concept	H-Index	Publications	Citations
1	Engineering	4	4	139
2	Applied Physics	4	4	139
3	Materials Science	4	4	139
4	Materials Engineering	3	3	115
5	Mechanical Engineering	2	2	74

Ming-Ku Chen

Publications

139

Citations

H-Index

Page 1

	Year	Citations
Multiprincipal-Element AlCrTaTiZr-Nitride Nanocomposite Film of Extremely High Thermal Stability as Diffusion Barrier for Cu Metallization Shou-Yi Chang, Ming-Ku Chen, Dao-Sheng Chen Journal of The Electrochemical Society High Thermal StabilityEngineeringMechanical EngineeringMetallic Functional MaterialThermal Stability	2009	64
Ru incorporation on marked enhancement of diffusion resistance of multi-component alloy barrier layers Shou-Yi Chang, Chenyuan Wang, Ming-Ku Chen, Journal of Alloys and Compounds Materials ScienceMaterials EngineeringEngineeringDiffusion ResistanceRu Incorporation	2010	41
High thermal stability of AlCrTaTiZr nitride film as diffusion barrier for copper metallization Shou-Yi Chang, Ming-Ku Chen Thin Solid Films Materials ScienceHigh Thermal StabilityAluminium NitrideEngineeringSuperalloy	2009	24
Multiprincipal-Element AlCrTaTiZr-Nitride Nanocomposite Film of Extremely High Thermal Stability as Diffusion Barrier for Cu Metallization Dao-Sheng Chen, Ming-Ku Chen, Shou-Yi Chang ECS Transactions High Thermal StabilityEngineeringMechanical EngineeringMetallic Functional MaterialCu Diffusion	2009	10

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