Concepedia

Ming-Ku Chen

MC

4

Publications

139

Citations

4

H-Index

2009

Active since

Affiliations

National Chung Hsing University(Current)

Ming-Ku Chen is an author at National Chung Hsing University specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringMicrostructureApplied PhysicsMaterial ScienceMaterials EngineeringNanomaterialsNanotechnologyMechanical EngineeringCorrosionSurface Science

Publications per year

2009–2010

4

Publications

4

Multiprincipal-Element AlCrTaTiZr-Nitride Nanocomposite Film of Extremely High Thermal Stability as Diffusion Barrier for Cu Metallization

Shou-Yi Chang, Ming-Ku Chen, Dao-Sheng Chen · Journal of The Electrochemical Society · 2009 · 64 citations

High Thermal Stability, Engineering, Mechanical Engineering +18

Ru incorporation on marked enhancement of diffusion resistance of multi-component alloy barrier layers

Shou-Yi Chang, Chenyuan Wang, Ming-Ku Chen et al. · Journal of Alloys and Compounds · 2010 · 41 citations

Materials Science, Materials Engineering, Engineering +10

High thermal stability of AlCrTaTiZr nitride film as diffusion barrier for copper metallization

Shou-Yi Chang, Ming-Ku Chen · Thin Solid Films · 2009 · 24 citations

Materials Science, High Thermal Stability, Aluminium Nitride +10

Multiprincipal-Element AlCrTaTiZr-Nitride Nanocomposite Film of Extremely High Thermal Stability as Diffusion Barrier for Cu Metallization

Dao-Sheng Chen, Ming-Ku Chen, Shou-Yi Chang · ECS Transactions · 2009 · 10 citations

High Thermal Stability, Engineering, Mechanical Engineering +18

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