Electrical Properties of Carbon Nanotube Bundles for Future Via Interconnects

Mizuhisa Nihei, Akio Kawabata, Daiyu Kondo, +3

Japanese Journal of Applied Physics

Carbon Nanotube BundlesEngineeringCarbon NanotechnologyCarbon-based MaterialNanoelectronics +15

Self-organization of Novel Carbon Composite Structure: Graphene Multi-Layers Combined Perpendicularly with Aligned Carbon Nanotubes

Daiyu Kondo, Shintaro Sato, Yuji Awano

Applied Physics Express

Materials ScienceAligned Carbon NanotubesElectrical EngineeringUsual Vertically-aligned MwntsEngineering +13

Low-Temperature Synthesis of Graphene and Fabrication of Top-Gated Field Effect Transistors without Using Transfer Processes

Daiyu Kondo, Shintaro Sato, Katsunori Yagi, +4

Applied Physics Express

Materials ScienceThickness-controlled GrowthElectrical EngineeringElectronic DevicesMulti-layer Graphene +13

Carbon nanotube via interconnect technologies: size‐classified catalyst nanoparticles and low‐resistance ohmic contact formation

Yuji Awano, Shintaro Sato, Daiyu Kondo, +4

physica status solidi (a)

Catalyst NanoparticlesEngineeringCarbon NanotechnologyChemistryNanotubes +14

Low-resistance multi-walled carbon nanotube vias with parallel channel conduction of inner shells

Mizuhisa Nihei, Daiyu Kondo, Akio Kawabata, +6

Materials ScienceParallel Channel ConductionElectrical EngineeringEngineeringCarbon-based Material +6

Low-temperature synthesis of single-walled carbon nanotubes with a narrow diameter distribution using size-classified catalyst nanoparticles

Daiyu Kondo, Shintaro Sato, Yuji Awano

Chemical Physics Letters

Materials ScienceNarrow Diameter DistributionCatalytic MaterialEngineeringCarbon-based Material +10

Carbon Nanotube Growth Technologies Using Tantalum Barrier Layer for Future ULSIs with Cu/Low-k Interconnect Processes

Masahiro Horibe, Mizuhisa Nihei, Daiyu Kondo, +2

Japanese Journal of Applied Physics

Materials ScienceMaterials EngineeringElectrical EngineeringEngineeringCarbon-based Material +13

Novel approach to fabricating carbon nanotube via interconnects using size-controlled catalyst nanoparticles

Shintaro Sato, Misato Nihei, Atsushi Mimura, +7

EngineeringNovel ApproachPreformed Catalyst NanoparticlesNanoheterogeneous CatalysisChemistry +14

Carbon nanotube growth from titanium–cobalt bimetallic particles as a catalyst

Shintaro Sato, Akio Kawabata, Daiyu Kondo, +2

Chemical Physics Letters

Materials ScienceCatalytic MaterialEngineeringCarbon-based MaterialNanomaterials +7

Low-resistance multi-walled carbon nanotube vias with parallel channel conduction of inner shells [IC interconnect applications]

Misato Nihei, Daiyu Kondo, Akio Kawabata, +6

Materials ScienceParallel Channel ConductionElectrical EngineeringEngineeringCarbon-based Material +11