In this work, the parallel micro-light-emitting diode (

$\mu $

LED) arrays based on via-holes structure with various array numbers from

$1\times 1$

$6\times 6$

are proposed. The photoelectric characteristics and frequency response characteristics of the

$\mu $

LED arrays under different array numbers are analyzed. The experiment and analysis results show that the −3 dB bandwidth of parallel

$\mu $

LED arrays based on via-holes structure improves as the number of arrays increases, and this result is attributed to the decrease in device RC time constant. However, the maximum withstand current density of

$\mu $

LED arrays decreases as the number of arrays increases, and the

$1\times 1\,\,\mu $

LED array achieves an extremely high withstand current density of 15.82 kA/cm ² . Among all the arrays, the

$3\times 3\,\,\mu $

LED array can reach the highest −3 dB bandwidth of 606 MHz at 7.91 kA/cm ² under the combined effect of withstand current density and array numbers. Meanwhile, the light output power for

$3\times 3\,\,\mu $

LED array is above 15.0 mW. This work sheds light on preparation of high-performance LEDs for visible light communication.

Shunan Yao

Publications