Nital S. Patel

Adaptive optimization of run-to-run controllers: the EWMA example

Nital S. Patel, S.T. Jenkins · IEEE Transactions on Semiconductor Manufacturing · 2000 · 73 citations

Engineering, Robust Control, Recursive Scheme +16

Multifeature, Sparse-Based Approach for Defects Detection and Classification in Semiconductor Units

Bashar Haddad, Sen Yang, Lina J. Karam et al. · IEEE Transactions on Automation Science and Engineering · 2016 · 50 citations

Fault Diagnosis, Engineering, Machine Learning +25

Exact variable-length anomaly detection algorithm for univariate and multivariate time series

Xing Wang, Jessica Lin, Nital S. Patel et al. · Data Mining and Knowledge Discovery · 2018 · 50 citations

Anomaly Detection, Engineering, Data Science +8

Robust control of set-valued discrete-time dynamical systems

John S. Baras, Nital S. Patel · IEEE Transactions on Automatic Control · 1998 · 33 citations

Nonlinear Control, Uncertain Nonlinear Systems, Engineering +8

Device dependent control of chemical-mechanical polishing of dielectric films

Nital S. Patel, Gerald A. Miller, C. Guinn et al. · IEEE Transactions on Semiconductor Manufacturing · 2000 · 31 citations

Chemical-mechanical Polishing, Engineering, Industrial Engineering +18