Wenjiao B. Wang

Superconformal chemical vapor deposition of thin films in deep features

Wenjiao B. Wang, Noel N. Chang, Tracey A. Codding et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2014 · 28 citations

Materials Science, Surface Technology, Thin Film Physics +13

Highly conformal magnesium oxide thin films by low-temperature chemical vapor deposition from Mg(H3BNMe2BH3)2 and water

Wenjiao B. Wang, Yu Yang, Ángel Yanguas-Gil et al. · Applied Physics Letters · 2013 · 28 citations

Highly Conformal Magnesium, Engineering, Thin Film Process Technology +18

Chemical vapor deposition of TiO2 thin films from a new halogen-free precursor

Wenjiao B. Wang, Ángel Yanguas-Gil, Yu Yang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2014 · 22 citations

Materials Science, Engineering, Growth Rate +15

Superconformal coating and filling of deep trenches by chemical vapor deposition with forward-directed fluxes

Tushar K. Talukdar, Wenjiao B. Wang, Gregory S. Girolami et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2018 · 21 citations

Engineering, Deep Trenches, Chemistry +18

Filling high aspect ratio trenches by superconformal chemical vapor deposition: Predictive modeling and experiment

Wenjiao B. Wang, John R. Abelson · Journal of Applied Physics · 2014 · 15 citations

Materials Science, Materials Engineering, Engineering +13