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Tomokazu Goto

TG

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Publications

1

Citations

36

H-Index

1

Active since

2003

Affiliations

Nagoya University(Current)

Tomokazu Goto is an author at Nagoya University specializing in applied physics, thin films, and engineering.

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Publications per year

2003–2003

1

Publications

1

Local Leakage Current of HfO<sub>2</sub>Thin Films Characterized by Conducting Atomic Force Microscopy

Hiroya Ikeda, Tomokazu Goto, Mitsuo Sakashita et al. · Japanese Journal of Applied Physics · 2003 · 36 citations

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