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Publications
1
Citations
23
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Active since
2004
Affiliations
Pohang University of Science and Technology(Current)
Sungju Ahn is an author at Pohang University of Science and Technology specializing in plasma etching, silicon carbide, and etching.
Publications per year
2004–2004
A study on the reactive ion etching of SiC single crystals using inductively coupled plasma of SF6-based gas mixtures
Sungju Ahn, S.Y. Han, J. L. Lee et al. · Metals and Materials International · 2004 · 23 citations
Natural Sciences, Materials Engineering, Materials Science +13
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