Shunfan Xie

Synergistic effect of aminosilane and K2CO3 on improving Chemical Mechanical Polishing performance of SiO2 dielectric layer

Qun Zhao, Shunfan Xie, Hanxiao Wang et al. · Materials Science in Semiconductor Processing · 2022 · 19 citations

Materials Science, Materials Engineering, Chemical Engineering +9

Control of the Micro-Defects on the Surface of Silicon Wafer in Chemical Mechanical Polishing

Qun Zhao, Shunfan Xie, Hanxiao Wang et al. · ECS Journal of Solid State Science and Technology · 2022 · 17 citations · Full text

Engineering, Mechanical Engineering, Residual Particles +20

Effect of Abrasive Particle Size Distribution on Removal Rate of Silicon Wafers

Hanxiao Wang, Qun Zhao, Shunfan Xie et al. · ECS Journal of Solid State Science and Technology · 2020 · 11 citations · Full text

Effect of 2-phosphonobutane-1,2,4-tricarboxylic acid (PBTCA) on Cu/Ta chemical mechanical planarization (CMP) in the barrier layer: A novel complexing agent and the dual role on Cu

Ni Meng, Xianglong Zhang, Shunfan Xie et al. · Surfaces and Interfaces · 2024 · 11 citations