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Synergistic effect of aminosilane and K2CO3 on improving Chemical Mechanical Polishing performance of SiO2 dielectric layer

Materials ScienceMaterials EngineeringChemical EngineeringSynergistic EffectEngineeringMaterial ProcessingMechanical EngineeringSurface ScienceSurface ModificationSurface TreatmentSurface ProcessingSio2 Dielectric Layer