Concepedia

C. Liu

CL

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Publications

1

Citations

38

H-Index

1

Active since

2007

Affiliations

The University of Osaka(Current)

C. Liu is an author at The University of Osaka specializing in surface engineering, smoothing, and extreme ultraviolet lithography.

Publications per year

2007–2007

1

Publications

1

Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics

Masahiko Kanaoka, C. Liu, Kazushi Nomura et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 38 citations · Full text

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