Concepedia

J. S. Park

JS

Statistics

Publications

1

Citations

13

H-Index

1

Active since

2009

Affiliations

Sungkyunkwan University(Current)

J. S. Park is an author at Sungkyunkwan University specializing in engineering, surface science, and microelectronics.

Top concepts

Publications per year

2009–2009

1

Publications

1

Highly selective etching of silicon nitride to physical-vapor-deposited a-C mask in dual-frequency capacitively coupled CH2F2∕H2 plasmas

J. S. Kim, B. S. Kwon, W. Heo et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2009 · 13 citations

, , +17

1–1 of 1