Concepedia

Veerla Swarnalatha

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Statistics

Publications

9

Citations

165

H-Index

9

Active since

2017

Affiliations

Indian Institute of Technology Hyderabad(Current)

Aichi Institute of Technology

Veerla Swarnalatha is an author at Indian Institute of Technology Hyderabad specializing in engineering, applied physics, and surface science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationChemical EngineeringMaterials EngineeringElectrical EngineeringNanoelectronics

Publications per year

2017–2022

9

Publications

9

Etching characteristics of Si{110} in 20 wt% KOH with addition of hydroxylamine for the fabrication of bulk micromachined MEMS

A. V. Narasimha Rao, Veerla Swarnalatha, Prem Pal · Micro and Nano Systems Letters · 2017 · 46 citations · Full text

Modified TMAH based etchant for improved etching characteristics on Si{1 0 0} wafer

Veerla Swarnalatha, A. V. Narasimha Rao, Akarapu Ashok et al. · Journal of Micromechanics and Microengineering · 2017 · 25 citations

Engineering, Mechanical Engineering, Laser Microscope +17

Effect of NH<sub>2</sub>OH on Etching Characteristics of Si{100} in KOH Solution

Avvaru Venkata Narasimha Rao, Veerla Swarnalatha, Akarapu Ashok et al. · ECS Journal of Solid State Science and Technology · 2017 · 21 citations

Materials Science, Materials Engineering, Chemical Engineering +14

Effective improvement in the etching characteristics of Si{110} in low concentration TMAH solution

Veerla Swarnalatha, Avvaru Venkata Narasimha Rao, Prem Pal · Micro & Nano Letters · 2018 · 19 citations

Engineering, Silicon On Insulator, Semiconductor Device +18

Determination of precise crystallographic directions on Si{111} wafers using self-aligning pre-etched pattern

Avvaru Venkata Narasimha Rao, Veerla Swarnalatha, Ashok Kumar Pandey et al. · Micro and Nano Systems Letters · 2018 · 11 citations · Full text

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