Concepedia

F. Hatakeyama

FH

5

Publications

290

Citations

5

H-Index

1986

Active since

Affiliations

Toshiba (Japan)(Current)

Yamagata University

F. Hatakeyama is an author at Toshiba (Japan) specializing in engineering, materials science, and electrical engineering.

Top concepts

EngineeringMaterial ScienceMicroelectronicsMicrofabricationElectronic PackagingElectrical InsulationElectrical EngineeringMechanical EngineeringChemistryCorrosion

Publications per year

1986–2002

5

Publications

5

Fundamental study of an electrostatic chuck for silicon wafer handling

K. Asano, F. Hatakeyama, K. Yatsuzuka · IEEE Transactions on Industry Applications · 2002 · 117 citations

Materials Science, Electrical Engineering, Wafer Scale Processing +14

Synthesis of Monodispersed Spherical β‐Silicon Carbide Powder by a Sol‐Gel Process

F. Hatakeyama, Shuzo Kanzaki · Journal of the American Ceramic Society · 1990 · 67 citations

Materials Science, Nh 4, Chemical Engineering +13

Fundamental characteristics of electrostatic wafer chuck with insulating sealant

K. Yatsuzuka, F. Hatakeyama, K. Asano et al. · IEEE Transactions on Industry Applications · 2000 · 61 citations

Materials Science, Electroactive Material, Electrical Engineering +15

Solid-state bonding of alumina to austenitic stainless steel

F. Hatakeyama, K. Suganuma, Tatsuki Okamoto · Journal of Materials Science · 1986 · 34 citations

Materials Engineering, Materials Science, Engineering +5

Stress induced leakage current of tunnel oxide derived from flash memory read-disturb characteristics

S. Satoh, Gertjan Hemink, F. Hatakeyama et al. · 2002 · 11 citations

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