F. Hatakeyama - Concepedia

Author

F. Hatakeyama

Also Known As

F. HATAKEYAMA, F. Hatakeyama, Fumio Hatakeyama

Publications

298

Citations

H-Index

Concepts

All Affiliations

F. Hatakeyama is an author at Toshiba (Japan) specializing in engineering, materials science, and electrical engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	4	4	279
2	Electrical Engineering	2	2	178
3	Chemical Engineering	1	1	67
4	Chemistry	1	1	67
5	Materials Engineering	1	1	34

F. Hatakeyama

Publications

290

Citations

H-Index

Page 1

	Year	Citations
Fundamental study of an electrostatic chuck for silicon wafer handling K. Asano, F. Hatakeyama, K. Yatsuzuka IEEE Transactions on Industry Applications Materials ScienceElectrical EngineeringWafer Scale ProcessingEngineeringAttractive Force	2002	117
Synthesis of Monodispersed Spherical β‐Silicon Carbide Powder by a Sol‐Gel Process F. Hatakeyama, Shuzo Kanzaki Journal of the American Ceramic Society Materials ScienceNh 4Chemical EngineeringEngineeringNanomaterials	1990	67
Fundamental characteristics of electrostatic wafer chuck with insulating sealant K. Yatsuzuka, F. Hatakeyama, K. Asano, IEEE Transactions on Industry Applications Materials ScienceElectroactive MaterialElectrical EngineeringWafer Scale ProcessingEngineering	2000	61
Solid-state bonding of alumina to austenitic stainless steel F. Hatakeyama, K. Suganuma, Tatsuki Okamoto Journal of Materials Science Materials EngineeringMaterials ScienceEngineeringSolid-state BondingCorrosion	1986	34
Stress induced leakage current of tunnel oxide derived from flash memory read-disturb characteristics S. Satoh, Gertjan Hemink, F. Hatakeyama,	2002	11

Page 1