Concepedia
Statistics
Publications
5
Citations
82
H-Index
Active since
2018
Affiliations
Tsinghua University(Current)
University of Chinese Academy of Sciences
Chinese Academy of Sciences
Institute of Microelectronics
Rongbo Zhao is an author at Tsinghua University specializing in engineering, optical system optimization, and screw theory.
Publications per year
2018–2024
Inverse kinematic solution of 6R robot manipulators based on screw theory and the Paden–Kahan subproblem
Rongbo Zhao, Zhiping Shi, Yong Guan et al. · International Journal of Advanced Robotic Systems · 2018 · 39 citations · Full text
Engineering, Mechanical Engineering, Robotics Engineering +16
Aberration optimization in an extreme ultraviolet lithography projectorvia a BP neural network and simulated annealing algorithm
Rongbo Zhao, Lisong Dong, Rui Chen et al. · Applied Optics · 2021 · 12 citations
Engineering, Manufacturing Engineering, Design Optimization +12
Machine Learning Applied to Electron Beam Lithography to Accelerate Process Optimization of a Contact Hole Layer
Rongbo Zhao, Xiaolin Wang, Yayi Wei et al. · ACS Applied Materials & Interfaces · 2024 · 11 citations
Engineering, Materials Engineering, Materials Science +17
Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography
Ziyu Hu, Rongbo Zhao, Xiaolin Wang et al. · ACS Omega · 2023 · 10 citations · Full text
Engineering, Materials Engineering, Digital Imaging +16
Critical dimension prediction of metal oxide nanoparticle photoresists for electron beam lithography using a recurrent neural network
Rongbo Zhao, Xiaolin Wang, Ziyu Hu et al. · Nanoscale · 2023 · 10 citations
Engineering, Materials Engineering, Materials Science +11
1–5 of 5