Concepedia

M. Decarli

MD

5

Publications

151

Citations

5

H-Index

2004

Active since

Affiliations

Fondazione Bruno Kessler(Current)

University of Cambridge

University of Trento

Tethys Research Institute

M. Decarli is an author at Fondazione Bruno Kessler specializing in microfabrication, engineering, and materials science.

Top concepts

EngineeringMicrofabricationMaterial ScienceApplied PhysicsThin FilmsMicrofluidicsNanofabricationSurface ScienceMicroelectronicsMaterials Engineering

Publications per year

2004–2010

5

Publications

5

Batch fabrication of metal oxide sensors on micro-hotplates

E. Barborini, S. Vinati, Matteo Leccardi et al. · Journal of Micromechanics and Microengineering · 2008 · 58 citations

Engineering, Microelectromechanical Systems, Micro-electromechanical System +20

Stress characterization of electroplated gold layers for low temperature surface micromachining

B. Margesin, Alvise Bagolini, V. Guarnieri et al. · 2004 · 57 citations

Engineering, Cyanide-gold Salt, Mechanical Engineering +20

Integration of a technique for the deposition of nanostructured films with MEMS-based microfabrication technologies: Application to micro gas sensors

M. Decarli, Leandro Lorenzelli, V. Guarnieri et al. · Microelectronic Engineering · 2008 · 14 citations

Materials Science, Nanostructured Films, Engineering +10

Fabrication of a MEMS-based separation module for liquid chromatography

Antonella Benvenuto, V. Guarnieri, Leandro Lorenzelli et al. · Sensors and Actuators B Chemical · 2007 · 12 citations

Engineering, Separation Science, Microfabrication +5

Influence of Etching Potential on Convex Corner Anisotropic Etching in TMAH Solution

Alvise Bagolini, A. Faes, M. Decarli · Journal of Microelectromechanical Systems · 2010 · 10 citations

Engineering, Integrated Circuits, Silicon On Insulator +18

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