Eiji Kawakami is an author at Tohoku University specializing in engineering, applied physics, and surface science.
Top concepts
Publications per year
1996–1996
1
1
Diffusion barrier property of TaN between Si and Cu
Takeo Oku, Eiji Kawakami, Masaki Uekubo et al. · Applied Surface Science · 1996 · 240 citations
Rows per page
1–1 of 1