Statistics
Publications
3
Citations
58
H-Index
3
Active since
1990
Affiliations
IBM (United States)(Current)
G. Fortuño‐Wiltshire is an author at IBM (United States) specializing in electrical engineering, applied physics, and engineering.
Publications per year
1990–1991
3
3
Near‐surface damage and contamination of silicon following electron cyclotron resonance etching
A. S. Yapsir, G. Fortuño‐Wiltshire, Jeff Gambino et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 25 citations
Materials Science, Electrical Engineering, Plasma Electronics +15
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1–3 of 3